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Cleanrooms and associated controlled environments Part 1: Classification of air cleanliness by particle concentration
This document specifies the air cleanliness classification for cleanrooms and clean zones divided by the concentration of suspended particles in the air, as well as for the isolation devices described in GB/T 25915.7. This document is applicable to the monitoring of the cumulative counting distribution of particulate matter with a lower limit of particle size ranging from 0.1μm to 5μm and its particle concentration. The concentration of ultrafine particles (<0.1μm) will be specified in the air cleanliness standard for nano-sized particles. At the designated sampling point, it is specified to use a light scattering (discrete) airborne particle counter (LSAPC) to determine the particle concentration of large particles (>5μm), which is quantified by the M descriptor. This document does not apply to characterizing the physical, chemical, radioactive, biological activity or other properties of airborne suspended particles.